Mechanistic studies of the acidolysis reactions occurring in silicon-containing bilayer photoresists

Authors
Michl, Josef
Wallraff, Gregory M.
Zharov, Ilya
Sherwood, Mark H.
Sooriyakamaran, Ratnam
Larson
DiPietro, Richard A.
Breyta, Gregory

Journal: Chemistry of Materials

Year: 2002

Volume: 14

Issue: 2

Pages: 656 - 663

DOI: 10.1021/cm010660i