Breyta, Gregory
Articles
Michl, Josef;
Wallraff, Gregory M.;
Zharov, Ilya;
Sherwood, Mark H.;
Sooriyakamaran, Ratnam;
Larson;
DiPietro, Richard A.;
Breyta, Gregory, Mechanistic studies of the acidolysis reactions occurring in silicon-containing bilayer photoresists. Chemistry of Materials 2002, 14(2), 656 - 663, 10.1021/cm010660i 
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